Vertical Resolution |
VSI, VEI < 0.5nm, VPI < 0.1nm |
Rateral Resolution |
0.05~7.2㎛(Depends on magnification) |
Height Repeatability |
≤0.3% @ 1σ |
Objective Lens |
Only Single Lens |
Zoom Lens |
1 Selectable(Manual) |
Camera Format |
1/2” mono CCD(option : 1/3” or 2/3”) |
Scan Method |
Piezo@SGS Closed loop |
Scan Range |
≤100㎛(option ≤250㎛) |
Scan Speed |
7.5㎛/sec(1x) / 22.5㎛/ sec(3x) |
IILumination |
White LED |
Filter |
2 Filter(manual) |
X/Y Axis Stroke |
25 X 13mm(Manual) |
Z Axis Stroke |
13mm(Manual) |
Tilt Aixs Stroke |
±2°(Manual) |
Work Table Size |
80 X 80mm |
Max Workpiece Load |
≤1kg |
Layout Size |
1100mm(W) X 700mm(D) X 1450mm(H) |
Total Weight |
about 35kg |
Auto Focus |
NO |
Stitching |
NO |
Software |
Surface View / Surface Map @ window 10 64bit |
Vibration Isolation |
Passive Type(Vertical Resonance : 2.5Hz) |
Input Power |
2∮, 110V/220V(±10%), 50/60Hz |